The Dresden ECRIS-2.45M is an electron cyclotron resonance ion source designed to produce low charged single particle and molecular ion beams in the range from about 10 microampere up to several milliampere, depending on the extracted ion species. Because of its compact design and few infrastructural requirements the Dresden ECRIS-2.45M can easily be integrated into existing beamlines or mounted on a high voltage terminal of electrostatic accelerators.
A set of permanent magnet rings is used to generate the magnetic field for the plasma confinement. The plasma is heated by a tunable 2.45 ± 15 GHz solid state microwave generator with a power of up to 200 W. The working gas is provided by a highly reproduceable and stable mass-flow controller.
The source features an advanced ion extraction system including an electrostatic einzel lens which also electrically insulates the source from the beamline. Using the standard setup, a maximum ion extraction voltage of 30 kV can be applied. Larger extraction potentials can be realized on request. The Dresden ECRIS-2.45M is delivered including all power supplies and a LabView based command and control system.
Figure 1 - ECRIS-2.45M ion extraction spectra
Figure 1 shows three exemplary ion extraction spectra. Furthermore, the following table gives an overview of ion currents which can be extracted from the source.
Ion Species
Ion current (µA)
H+
1200
H2+
3200
H3+
250
He+
3200
Ne+
1200
Ar+
450
Ar2+
10
Please note: The ion output depends strongly on the ion source parameters. To achieve the highest possible ion output the source parameters need to be optimized for each ion species individually.
Parameters
Source Parameters
microwave power
200 W
source potential
30 kV, 10 mA
extraction potential
-6 kV, 50 mA
lens potential
-30 kV, 10 mA
General Parameters
length
460
diameter
340
weight
~35 kg (77 lbs)
beamline attachment flange
DN 160 CF
Infrastructural Requirements
cooling
air cooled, no cooling water required
vacuum conditions
base pressure 1e-7 mbar (1e-5 mbar with working gas)
power consumption
2 kW
Scope of Delivery
ECR ion source incl. vacuum vessel, ion optical components, and permanent magnet system
200 W microwave generator
high voltage vacuum feedthroughs
highly reproduceable and stable mass-flow controller
power supply units for the operation of the ion source
control system including computer and software
Optional Equipment
heating tent incl. temperature control
19" rack for power supplies and measurement equipment
vacuum system (TMP, fine vacuum, vacuum measurement)
medium or large ion beam line for ion charge state separation
